Carl Zeiss Auriga Cobra FIB Focused Ion Beam Scanning Electron Microscope (FIBSEM)

The Auriga Cobra FIB FESEM instrument s a cross-beam workstation; therefore it combines a high resolution scanning electron microscope (HRSEM) with the precision milling and nanofabrication abilities of high resolution focused ion beam (FIB). This instrument is multifunctional and can be used for SEM imaging, TEM lamella preparation, milling, cross-sectioning and imaging with either FIB or SEM. The instrument also has a charge compensation system which is used when imaging non-conductive samples or insulating materials without coating, as well as the STEM detector and Energy and Angle Selective EsB detector that allows an almost pure compositional image to be obtained by filtering out unwanted surface information. It also has kliendiek micromanipulator which is used for transferring the prepared lamella to the TEM grid and further characterize with the STEM without breaking the vacuum or taking the sample out. The instrument has its applications in material analysis, life sciences and semiconductors.