The Auriga FEG SEM is a fully digital 30 kV Hi Resolution FEG SEM equipped with EDS and a range of secondary and backscattered detectors peculiar to the machine.
a charge compensation facility
an in situ cleaning function (a Zeiss patent)
a four quadrant back scatter detector
a chamber SE-detector
a specimen Current Monitor
two chamber IR-CCD cameras
a EsB detector for AURIGA (this is CZ's patented detector for low kV work isolating specific electrons).
pneumatic retractable Multi-mode STEM-detector Bright Field & Dark Field microscopy
the Auriga can be operated using combined secondary electron and secondary ion detection.
the Auriga's on-axis low voltage back scatter detector (EsB-energy selective backscatter detector), allows for the viewing of backscattered electrons that exit the surface at a perpendicular angle to the service.
The Auriga has excellent low kV imaging capabilities.
EDS from Oxford - Advanced AZtecEnergy package with an SDD 127 eV, the latest from Oxford offering
Microscope - Electron Microscopes - Scanning Electron Microscope (SEM)
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