The XPS/ESCA system is a multi-technIque surface analysis instrument based on highly successful scanning x-ray microprobe technology. This technology provides high performance micro-area spectroscopy, chemical imaging, and secondary electron imaging. XPS, is also known as ESCA, and is the most widely used surface analysis technique in advanced labs because of its relative simplicity in use and data interpretation. The sample is irradiated with mono-energetic x-rays causing photoelectrons to be emitted from the same sample surface. An electron energy analyzer determines the binding energy and intensity of a photoelectron peak, the elemental identity, chemical state and quantity of an element are determined. Beam charge neutralization method provides effortless analysis of insulating samples using a combination of low energy ions and electrons. The integral floating column argon ion gun provides and impressive sputter depth profiling capability for inorganic thin film structures. The optional C60 ion gun provides a unique and powerful sputter depth profiling capability for many organic materials. A fully automated five axis sample manipulator facilitates the automatic analysis of multiple samples and provides Zalar Rotation capabilities for argon or optional C60 sputter depth profiling.