The equipment is a 3D surface profiler capable of measuring surface forms and roughness with a resolution down to 0.2 nanometre. Surface profiling is achieved by using a stylus mechanism integrated with a grating system which is responsible for measuring capability of the instrument. The grating rotates about a precision pivot, and is illuminated using a collimated laser beam. The diffractive patterns received from the grating are analysed using specially designed optics. The surface profile and characteristics are judged based on these received diffractive patterns.