Cameca SX50 Electron Microprobe
The Cameca SX-50 Electron Microprobe is equipped with four multi-crystal wavelength-dispersive spectrometers (WDS) and one energy-dispersive spectrometer (EDS). The microprobe is fully automated using the PC-based software package Probe for Windows (Advanced Microbeam Co.), which allows rapid quantitative chemical analysis of elements from Boron to Uranium. Electron-beam scanning capability allows surface imaging in secondary and back-scattered electrons as well as x-ray compositional mapping.